Centre for Nanoscience
and Nanotechnology

  • CNRS

PIMENT Platform

Profilometer Tencor D500

Mechanical profilometer   /   KLA-TENCOR FRANCE SARL

Contacts :   THOMASSET   Muriel  

Location : E62

Mechanical profilometer with two detectors system photodiode

  • Space
    Mechanical profilometer Tencor
  • Space
    Profilometer Tencor
  • Space
    Profilometer Tencor full view

Caractéristiques

  • Max height   :   3cm
  • Curvature radius of the tips   :   2µm
  • Max sample size   :   4 inches