Centre for Nanoscience
and Nanotechnology
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Centrale de Technologie
PIMENT Platform
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Lithography
E-Beam Lithography
Optic/UV Lithography
Alternative and Emerging Lithography
Deposition
Metal deposition and electrolytic growth
Dielectric deposition and thermal treatments
Etching
Dry Etching
Wet Etching Chemistry and ElctroChemistry
Analysis / Back-end
Electron and near-field microscopy
Back-End
Electrical and physico-chemical characterizations
Members
Spray coater EVG 101
Spray coating system /
SUSS MICROTEC LITHOGRAPHY GMBH*
Contacts : BOUVILLE David / BARDOU Nathalie
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Spray Coating EVG
SprayCoater EVG101
Detail du spray coater
