Centre for Nanoscience
and Nanotechnology
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Centrale de Technologie
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Lithography
Nano Lithography
Optic/UV Lithography
Alternative Lithography
Deposition
Metal deposition
Dielectric deposition and thermal treatments
Etching
Dry Etching
Wet Etching Chemistry and ElctroChemistry
Analysis / Back-end
Electron and near-field microscopy
Back-End
Electrical and physico-chemical characterizations
Members
ICP-RIE STS
Inductively Coupled Plasma, High Rate Magnetic source /
SPTS TECHNOLOGIES
Contacts : / HERTH Etienne
Location : N.C.