SEM Philips XL 40 LaB 6
Large-Chamber LaB6 Scanning Electron Microscope with Integrated Micro-Manipulators / FEI
Contacts : COURAUD Laurent
/ DUPUIS Christophe
Location : RD123a
Scanning Electron Microscope with LaB6 é emitter, Very Large Chamber and housing for micro-manipulators (Kleindiek MM3A)
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Philips XL40 LaB6
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Overview of the system
Caractéristiques
- Electron gun : LaB6 crystal emitter
- Objective lens : HR (field free)
- Voltage : 1kV - 30kV
- Spot size : 1 to 8
- Magnification : x30 to x300000
- Stage : 3 axis motorized stage, manual Z and Tilt -30° to 60°
- Eucentric height : 10 mm
- Resolution : 3 nm @30kV
- Max sample size : 12 inches
- Detectors : SE (ETD)
- Stage : Travel ranges: X,Y +/-75mm Z 37mm
