Contacts : COURAUD Laurent / DURNEZ Alan
Location : E 51
The MEB 400 UHV-SL is an ultra-vacuum evaporation equipment load lock with: - heating lamp (250°C max) - UV lamp (ozone generator for the elimination of organic contaminants) - oxidation capability (Josephson contact) - vacuum limit at 10-8mbar Chamber with : - electron gun with 6 possible materials (Ti, Au, Ni, Ge, Pt) - chamber vacuum limit at 2.10-9mbar - a 4-inch diameter substrate holder with planetary rotation and tilt with possible programming, heating of the substrate holder up to 700°C - a KDC75 ion cannon - liquid nitrogen cooling above the turret to limit heating induced by evaporation
Caractéristiques
