SEM Thermo Verios 5 UC
Extreme High Resolution scanning electron microscope / THERMO FISHER SCIENTIFIC
Contacts : MAHUT Frédéric
/ DUPUIS Christophe
/ COURAUD Laurent
Location : SB04SBE345
XHR Scanning Electron Microscope. SE (ETD, TLD), BSE (MD, ICD, DBS), STEM3+ detectors. EDS Bruker QUANTAX XFlash 760 60mm² 126eV - XFlash FlatQuad 60mm² 129eV, Electron Channeling Contrast Imaging
Caractéristiques
- Max sample size : 6 inches wafers
- Resolution : 0,6 nm @ 2kV
- Stage : 5 axis compucentric piezo stage, deceleration
- Detectors : SE (ETD, TLD), BSE (MD, ICD, retractable DBS), STEM
- Voltage : 350V-30kV
- Current : 0,8 pA to 100 nA
- Detectors : EDS Bruker QUANTAX XFlash 760 60mm² 126eV - XFlash FlatQuad 60mm² 129eV
- Option : Electron Channeling Contrast Imaging
