Nanoimprint Nanonex NX 2500
Nanoimprint lithography (NIL) tool / NANONEX
Contacts : DECANINI-CRETON Dominique
- press for UV and Thermal imprint
- uniform pressure applied by membranes
Caractéristiques
- Max sample size : 4 inches
- Max temperature : 200°C
- Min sample size : small piece
- Temperature range : room temperature to 200°C
- Type of cooling : water cooling (skid2)
- Light source : 320 nm - 390 nm