SEM Hitachi SU8000

Cold Field Emission Gun (FEG) Scanning Electron Microscope / HITACHI

Contacts : MAHUT Frédéric / DUPUIS Christophe

Location : RD123b

Cold FEG Scanning Electron Microscope. SE BSE STEM EBIC Detectors.

SU8000
Vue générale
Chamber fitted with Cryo-transfer

Caractéristiques

Detectors : SE (Lower, Upper), BSE (Upper, Top), STEM, EBIC
Electron gun : W cold FEG emitter
Max sample size : 6 inches
Resolution : 1nm @ 15 kV WD=4mm
Resolution : 1.4nm @ 1kV WD=1.5mm (deceleration)
Resolution : STEM mode : 1nm @ 30 kV WD=8mm
Stage : 5 axis compucentric stage, deceleration
Objective lens : Immersion
Magnification : x30 to x800000
Voltage : 300V - 30kV
Others : Anticontaminator (cold trap)
Current : 1.5 pA to 15 nA
Others : Cryo-transfer
Others : Loadlock
Others : Column: 2-stage condenser

Expertises

Nanomanipulation

Nanomanipulation under 4 ultra-flat tips station (prober shuttle): contacting nanostructures (nanoparticles, nanowires...) for electrical probing, pick&place ...

Contacts : Fabien BAYLE

Electric caracterization

Contacts and in-situ characterizations of nanostructures (tips connected to nanomanipulators) EBIC imaging of junctions

Contacts : Fabien BAYLE

Cryo-transfer

SEM-STEM compatible cryotransfer (nitrogen freezing of nanoparticles in solutions)

Contacts : Fabien BAYLE

Observation of nanostructures with SE, STEM

Carbon nanotubes, epitaxial growths (micro-crystals, nanowires with quantum wells), patterns etched

Contacts : Fabien BAYLE

Applications

LEDs and Photo-voltaics

Electrical and optical Probing of nanostructures (nanowires...) bricks of LEDs and photo-voltaic devices based on junctions

Contacts : Fabien BAYLE

Nanomedicine

Morphology and size of nanoparticles involved in healthcare research

Contacts : Fabien BAYLE