Wafer bonder Süss SB6
Wafer bonding / Anodic bonding / fusion bonding / SUSS MICROTEC LITHOGRAPHY GMBH*
Contacts : DUPUIS Christophe
/ BARDOU Nathalie
Location : N.C.
-
-
Caractéristiques
- Sample Size : up to 6'' wafers
- Temperature range : up to 500°C
- Pressure : up to 20kN