Centre for Nanoscience
and Nanotechnology

  • CNRS

PIMENT Platform

Oven RTA home-made

Rapid Thermal Annealing equipment   /   L2M

Contacts :   LAFOSSE   Xavier  

Location : N.C.

RTA dedicated to contacts annealing.

  • Space
    RTA Home-made
  • Space
    RTA Homemade

Caractéristiques

  • Gas Line   :   ArH2, N2
  • Max temperature   :   up to 950°C