Centre for Nanoscience
and Nanotechnology

  • CNRS
  • UPSaclay
  • UParis

PIMENT Platform

RTA Home-made

Rapid Thermal annealing   /   L2M

Contacts :   LAFOSSE   Xavier  

RTA dedicated to contacts annealing.

  • Space
    RTA Home-made
  • Space
    RTA Homemade

Caractéristiques

  • Gas Line   :   ArH2, N2
  • Max temperature   :   up to 950°C