Centre for Nanoscience
and Nanotechnology

  • CNRS
  • UPSaclay
  • UParis

PIMENT Platform

Aligneur Suss_MJB3-1

MJB3 optical lithography   /   SussMicrotec

Contacts :   BOUVILLE   David  

teaching equipement

  • Space
    Aligneur Suss_MJB3_1
  • Space
    MJB3-1

Caractéristiques

  • Resolution   :   2 microns
  • Wave length   :   broad band
  • Max sample size   :   2"
  • Min sample size   :   5mm