Verios_G4_HP

XHR Scanning Electron Microscope.   /   ThermoFisher Scientific

Contacts :   BAYLE   Fabien     /   DUPUIS   Christophe   /   MAHUT   Frederic

XHR Scanning Electron Microscope. SE (ETD, TLD), BSE (MD, ICD, DBS), STEM detectors.

  • Space
    Colonne
  • Space
    Vue générale

Caractéristiques

  • Detectors   :   SE (ETD, TLD), BSE (MD, ICD, retractable DBS), STEM
  • Max sample size   :   4 inches wafers, 5 inches photomask
  • Resolution   :   0.7nm @ 2kV
  • Stage   :   5 axis compucentric piezo stage, deceleration
  • Electron gun   :   FEG Schottky (+"UniColor" monochromator)
  • Objective lens   :   Field Free (Search mode), Immersion
  • Voltage   :   50V - 30kV
  • Current   :   0.7 pA to 100 nA
  • Resolution   :   STEM mode: 1nm@30kV
  • Magnification   :   x30 to 2000000x (polaroïd)
  • Others   :   Anticontaminator (cold trap), plasma cleaner
  • Others   :   Autoloader
  • Others   :   Column Elstar (no mechanical alignment)
Expertises

Low kV imaging of nanostructures on insulators

Nanoparticles on insulators, nanocrystals

  • Space
  • Space

Contacts : Fabien BAYLE

Observation of photoresists

Low dose é imaging of spin-coated Photoresist layers (top view, cross-sections) and 3D lithography grown micro-structures (polymer)

Contacts : Fabien BAYLE, Christophe DUPUIS

Mask observation

Observation of lithography mask patterns (on thick insulator)

Contacts : Fabien BAYLE, Christophe DUPUIS

Applications

Epitaxial growths

Morphology of nanowires grown by epitaxy (shape, size)

  • Space

Contacts : Fabien BAYLE

Morphology and rugosity of processed materials

Observe Morphology and rugosity of processed materials (deposition, lithography, etching). Put in evidence the presence of Residual contaminations. Applied to Photonic waveguides, Quantum Physics circuits ...

  • Space

Contacts : Fabien BAYLE

Nanoparticles

Dispersed nanoparticles on substrate (spin coating, dip-coating...). Applied to sensors and emitter sources.

Contacts : Fabien BAYLE

Nano-devices

Nano-devices and patterns formed by local deposition (Focused Ion Beam)

  • Space

Contacts : Fabien BAYLE