SEM Hitachi S2600N
Low Vacuum tabletop SEM, small chamber / HITACHI
Contacts : MAHUT Frédéric
/ DUPUIS Christophe
Location : RD831
Low Vacuum (pressure up to 300 Pa) tabletop SEM with "hairpin" W filament, small chamber
Caractéristiques
- Emitter : W "hairpin" filament with Wehnelt cap cover (electrostatic lens)
- Column : 2-stage condenser lens
- Objective lens : without mobile aperture
- Stage : Motorized X&Y (driven by external controller with joystick), Manual Z, R, T
- Detectors : ETD (Everhart-Thornley), BSE (4-quads Silicon) retractable and CCD-IR in chamber
- Resolution : 3.5 nm @ 20 kV (SE)
- Resolution : 4.5 nm @ 25 kV (BSE)