Centre for Nanoscienceand Nanotechnology
PIMENT Platform
Contacts : BAYLE Fabien
Low Vacuum (pressure up to 300 Pa) tabletop SEM with "hairpin" W filament, small chamber
Caractéristiques
Topographical observation of micro-devices obtained by cleanroom processes (thin film deposition, lithography, etching)
Contacts : Fabien BAYLE
Microelectromechanical systems