Centre for Nanoscience
and Nanotechnology
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Centrale de Technologie
PIMENT Platform
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PIMENT Platform
The C2N Micro-Nano-Technology Facility
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Lithography
E-Beam Lithography
Optic/UV Lithography
Alternative and Emerging Lithography
Deposition
Metal deposition and electrolytic growth
Dielectric deposition and thermal treatments
Etching
Dry Etching
Wet Etching Chemistry and ElctroChemistry
Analysis / Back-end
Electron and near-field microscopy
Back-End
Electrical and physico-chemical characterizations
Members
Profilometer Stylus Dektak XT
Mechanical profilometer /
Bruker
Contacts : DURNEZ Alan
Dektak XT
Caractéristiques
Resolution : 1 Å @ 6.5 μm
Resolution : 10 Å @ 65.5 μm
Resolution : 80 Å @ 524 μm
Resolution : 150 Å @ 1mm
Sample Size : 6 pouce
Scanning distance : 1 mm max
Stylus type : 2 µm
Scanning distance : 200 mm
Support force : 0.03-15 mg