Centre for Nanoscience
and Nanotechnology
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Centrale de Technologie
PIMENT Platform
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PIMENT Platform
The C2N Micro-Nano-Technology Facility
Virtual Visit
Work with us
Lithography
E-Beam Lithography
Optic/UV Lithography
Alternative and Emerging Lithography
Deposition
Metal deposition and electrolytic growth
Dielectric deposition and thermal treatments
Etching
Dry Etching
Wet Etching Chemistry and ElctroChemistry
Analysis / Back-end
Electron and near-field microscopy
Back-End
Electrical and physico-chemical characterizations
Members
Parylene Coating Equipment Comelec C30H ALD
Atomic Layer Deposition equipment - Parylene thin films /
Comelec
Contacts : LAFOSSE Xavier
Machine de dépôt ALD C30H ALD
