Evap Plassys MEB 550 S
Electron beam evaporator for metallic thin films / PLASSYS
Contacts : BAPTISTE Téo
/ AASSIME Abdelhanin
Location : E42
The Plassys MEB550S evaporator is an equipment allowing the deposition of thin metallic layers on various substrates from cm2 to 4".
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Electron Beam Evaporator MEB 550S
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Electron Beam Evaporator MEB 550S
Caractéristiques
- Available Metals : Al, Au, Ge, Ni, Pd, Pt, Ti
- Working pressure : 10-8 mbar
- Max sample size : 4"
- Crucible size : 15 cc
- Gas Line : Ar, N2
- Ion cannon : homogeneous on 3"
- Tilt : Yes
