Co-Sputter Denton Explorer 14

RF / DC cathodic co-sputtering equipment   /   DENTON VACUUM

Contacts :   CONNETABLE   Lucie     /   DURNEZ   Alan

RF/DC Co-sputtering depositions. Metallic thin films and some reactive sputtering depositions.

  • Space
    Denton Co-Sputtering Explorer 14
  • Space
    Co-pulvérisation cathodique DENTON Explorer 14

Caractéristiques

  • Available Metals   :   Au, Al, Ti, Pt, Cu, W, Pd...
  • Gas Line   :   Ar, N2, O2