Denton Co-Sputtering Explorer 14

RF/DC cathodic co-sputtering equipment. 3 x 3" confocal targets   /   Denton

Contacts :   MARTIN   Antoine     /   AASSIME   Abdelhanin

RF/DC Co-sputtering depositions. Metallic thin films and some reactive sputtering depositions.

  • Space
    Co-pulvérisation cathodique DENTON Explorer 14

Caractéristiques

  • Available Metals   :   Au, Al, Ti, Pt, Cu, W, Pd...
  • Gas Line   :   Ar, N2, O2