Denton Co-Sputtering Explorer 14
RF/DC cathodic co-sputtering equipment. 3 x 3" confocal targets / Denton
Contacts : MARTIN Antoine
RF/DC Co-sputtering depositions. Metallic thin films and some reactive sputtering depositions.
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Caractéristiques
- Available Metals : Au, Al, Ti, Pt, Cu, W, Pd...
- Gas Line : Ar, N2, O2