Centre for Nanoscienceand Nanotechnology
PIMENT Platform
Contacts : COURAUD Laurent / ULYSSE Christian
Location : E51
This technique can achieve reactive sputtering processes (NbN deposition).
Caractéristiques
NbN films can be grown with this technique which is a key material for Superconducting Single Photon Detectors (SSPD) elaboration.
Contacts : laurent.couraud@c2n.upsaclay.fr, chritian.ulysse@c2n.upsaclay.fr