Plassys Sputtering MP700S

Sputtering deposition technique mostly metallic thin films   /   Plassys

Contacts :   COURAUD   Laurent     /   ULYSSE   Christian

This technique can achieve reactive sputtering processes (NbN deposition).

  • Space
    Metallic thin films deposition

Caractéristiques

  • Materials   :   Nb, Au, Pd, MgO
  • Gas Line   :   Ar, N2
  • Vacuum   :   Turbo molecular pumping
Expertises

NbN for SSPD detectors

NbN films can be grown with this technique which is a key material for Superconducting Single Photon Detectors (SSPD) elaboration.

Contacts : laurent.couraud@c2n.upsaclay.fr, chritian.ulysse@c2n.upsaclay.fr