Alcatel SCM600 e-beam evaporator
Electron beam evaporator metallic thin films / Alliance concept
Contacts : COURAUD Laurent
/ LEROY Laetitia
The Alcatel SCM 600 is an electron beam evaporator allowing the deposition of thin metallic films.
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Alcatel SCM600
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Alcatel SCM 600
Caractéristiques
- Electron gun : 8kW
- Crucible size : 4 x 7cc
- Available Metals : Ti, Au, Pd, Pt
- Ion source : Ion tech 5cm
- Limit vacuum : 8.0E-8 mbars
- Max sample size : 4"
- Gas Line : Ar, N2
