Alcatel SCM600 e-beam evaporator

Electron beam evaporator metallic thin films   /   Alliance concept

Contacts :   COURAUD   Laurent     /   LEROY   Laetitia

The Alcatel SCM 600 is an electron beam evaporator allowing the deposition of thin metallic films.

  • Space
    Alcatel SCM 600

Caractéristiques

  • Electron gun   :   8kW
  • Crucible size   :   4 x 7cc
  • Available Metals   :   Ti, Au, Pd, Pt
  • Ion source   :   Ion tech 5cm
  • Limit vacuum   :   8.0E-8 mbars
  • Max sample size   :   4"
  • Gas Line   :   Ar, N2