Co-Evap Plassys MEB 800
Electron beam co-evaporator for metallic thin films / PLASSYS
Contacts : LEROY Laetitia
/ AASSIME Abdelhanin
The MEB 800 is an ultra-vacuum co-evaporation equipment with 3 electron beams allowing the production of thin metallic layers.
Caractéristiques
- Available Metals : Au, Hf, Nb, Pd, Ru, Ti, V, Y, Zr
- Working pressure : < 8e-8mbar
- Limit vacuum : < e-10mbar
- Max sample size : 6"
- Electron gun : 3 x4 crucibles
- Crucible size : 15cc
- Gas Line : O2
- Temperature : 700°C max
