Electron beam co-evaporator Plassys MEB 800

Electron beam co-evaporator metallic thin films   /   Plassys

Contacts :   LEROY   Laetitia     /   AASSIME   Abdelhanin

The MEB 800 is an ultra-vacuum co-evaporation equipment with 3 electron beams allowing the production of thin metallic layers.

  • Space
    Co-évap MEB800
  • Space
    intérieur
  • Space
    intérieur2

Caractéristiques

  • Available Metals   :   Y, Zr, V, Sn,Ti, Au, Al
  • Working pressure   :   < 8e-8mbar
  • Limit vacuum   :   <e-10mbar
  • Max sample size   :   6"
  • Electron gun   :   3 x4 crucibles
  • Crucible size   :   15cc
  • Gas Line   :   O2
  • Temperature   :   700°C max
Applications

getters

getters

Contacts : Laetitia Leroy

co-evaporation

co-evaporation of trinary and binary layers

Contacts : Laetitia Leroy, Abelhanin Aassime