Evap Plassys MEB 550 SLX
Electron beam evaporator for metallic thin films / PLASSYS
Contacts : COURAUD Laurent
/ ULYSSE Christian
Location : E51
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Plassys MEB 550SLX e-beam evaporator
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MEB 550SLX
Caractéristiques
- Electron gun : 8kW
- Crucible size : 8 x 15cc
- Materials : Ti, Au, Ni, Ge, Cr, Al
- Quartz number : 6
- Ion source : 10cm
- Limit vacuum : 9E-9 mbars
- Gas Line : Ar, N2
