MEB Hitachi S3600N
Large Variable Pressure (low vac/high vac) Scanning Electron Microscope Tungsten filament / Hitachi
Contacts : MAHUT Frederic
/ COURAUD Laurent
Variable Pressure (low vacuum/high vacuum) Scanning Electron Microscope with Hair pin Tungsten filament and very large chamber. SE, BSE (retractable), ESED/AE (low vac), EDX detectors.
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S3600N
Vue générale
Caractéristiques
Detectors : SE, retractable BSE, ESED/AE preamplifier (low vac), EDX-nitrogen cooled Si(Li) 10mm^2
Pressure : From 1 to 300 Pa with "Low Vacuum" mode
Stage : 5 axis motorized compucentric stage
Resolution : 3nm @ 25kV WD=5mm
Resolution : 4.5 nm @ 25kV 1Pa (BSE mode)
Electron gun : Hairpin tungsten filament
Others : Column: 2-stage condenser
Voltage : 1kV - 30kV (low HV emission bias)
Magnification : x20 to x300000
Max sample size : 10 inches
Objective lens : HR (field free)
Expertises
Observation and EDX analysis of thin films and micro-devices
é imaging (topography, roughness) and elemental analysis (region of interest, line profile, mapping) of thin films and micro-devices realized by clean room processes (vacuum deposition, optical lithography, etching)
Contacts : Fabien BAYLE
Micro-analysis layers reconstruction
EDX Micro-analysis of thin layer stacks using dedicated Stratagem software to reconstruct {material, thickness} stacks of multi-layered vacuum deposits.
Contacts : Fabien BAYLE
Applications
MEMS (Microelectromechanical systems)
3D overview of the micro-devices using Tilt
Contacts : Fabien BAYLE
