Centre for Nanoscience
and Nanotechnology

  • CNRS
  • UPSaclay

PIMENT Platform

AFM_Agilent_Pico+

Small Atomic Force Microscope   /   Agilent (Molecular Imaging)

Contacts :   BAYLE   Fabien  

Atomic Force Microscope with Small Bench, fitted with Resiscope measurement device

  • Space
    2
  • Space
    Small sample bench (2x2cm^2, thickness ≤5mm) Fitted with Resiscope
  • Space
    1
  • Space
    Vue générale

Caractéristiques

  • Resolution   :   50 pm (vertical) on Large scanner, 20 pm on Small scanner
  • Scanner   :   Large (X,Y: 100x100µm, Z:10µm), Small (X,Y: 10x10µm, Z:1µm)
  • Others   :   Environment: Air / controlled (Nitrogen)
  • Mode   :   Contact (fitted with resiscope nozzle), Tapping
  • Others   :   Closed loop
  • Max sample size   :   2 inches wafers
Expertises

Contact

Contact mode

  • Space

Contacts : Fabien BAYLE

Tapping

Tapping mode

  • Space

Contacts : Fabien BAYLE

Local resistance

Local resistance measurements (10^2 to 10^12 Ohms)

  • Space

Contacts : Fabien BAYLE

Applications

Rugosity

Rugosity measurements (Ra, Rq, Sq...)

  • Space

Contacts : Fabien BAYLE

i-V

Local i-V traces

Contacts : Fabien BAYLE

Resiscope

Local resistance measurements (over ten decades in the range from10^2 to10^12 Ohms) and mapping. Doping levels and profiles on cleaved cross-section

  • Space

Contacts : Fabien BAYLE

Topography

Topography profile of nanostructures (diffraction grating, nanoimprint embossing…)

Contacts : Fabien BAYLE