AFM Agilent Pico+
Small Atomic Force Microscope / Agilent (Molecular Imaging)
Contacts : BAYLE Fabien
/ COURAUD Laurent
Atomic Force Microscope with Small Bench, fitted with Resiscope measurement device
Caractéristiques
- Resolution : 50 pm (vertical) on Large scanner, 20 pm on Small scanner
- Scanner : Large (X,Y: 100x100µm, Z:10µm), Small (X,Y: 10x10µm, Z:1µm)
- Others : Environment: Air / controlled (Nitrogen)
- Mode : Contact (fitted with resiscope nozzle), Tapping
- Others : Closed loop
- Max sample size : 2 inches wafers