AFM_Agilent_5500LS_PicoMaps

Large Atomic Force Microscope   /   Agilent

Contacts :   BAYLE   Fabien  

Atomic Force Microscope with Large Bench

  • Space
    Overview of the system

Caractéristiques

  • Max sample size   :   4 inches wafers
  • Scanner   :   Large (X,Y: 100x100µm, Z:10µm), Small (X,Y: 10x10µm, Z:1µm)
  • Mode   :   Contact, Tapping
  • Others   :   Closed loop
  • Resolution   :   50 pm (vertical) on Large scanner, 20 pm on Small scanner
Expertises

Contact

Contact mode

Contacts : Fabien BAYLE

Tapping

Tapping mode

Contacts : Fabien BAYLE

Applications

Rugosity

Rugosity measurements (Ra, Rq, Sq...)

Contacts : Fabien BAYLE

Periodicity measurements

Calculation of pitch and depth of gratings

Contacts : Fabien BAYLE

Topography

Topography profile of nanostructures (diffraction grating, nanoimprint embossing…)

Contacts : Fabien BAYLE