AFM Agilent 5500LS PicoMaps
Large Atomic Force Microscope / Agilent
Contacts : BAYLE Fabien
/ COURAUD Laurent
Atomic Force Microscope with Large Bench
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AFM_Agilent_5500LS_PicoMaps
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Overview of the system
Caractéristiques
- Max sample size : 4 inches wafers
- Scanner : Large (X,Y: 100x100µm, Z:10µm), Small (X,Y: 10x10µm, Z:1µm)
- Mode : Contact, Tapping
- Others : Closed loop
- Resolution : 50 pm (vertical) on Large scanner, 20 pm on Small scanner
