Centre for Nanoscience
and Nanotechnology
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Centrale de Technologie
PIMENT Platform
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PIMENT Platform
The C2N Micro-Nano-Technology Facility
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Lithography
E-Beam Lithography
Optic/UV Lithography
Alternative and Emerging Lithography
Deposition
Metal deposition and electrolytic growth
Dielectric deposition and thermal treatments
Etching
Dry Etching
Wet Etching Chemistry and ElctroChemistry
Analysis / Back-end
Electron and near-field microscopy
Back-End
Electrical and physico-chemical characterizations
Members
Scriber Karl-SUSS RH-100
Manual diamond scriber /
Karl-SUSS
Contacts : DURNEZ Alan
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SCRIBER HR100
Scriber Si
Caractéristiques
Stylus type : Diamond
Others : Binocular alignment
Substrates : Silicon wafers and substrates up to100mm
