LEO_1430

Large tilt Scanning Electron Microscope + EDX   /   ZEISS

Contacts :   COURAUD   Laurent  

Scanning Electron Microscope with Gemini column, EDX Si(Li) Oxford 10mm^2, large tilt stage (up to 90°), micro-manipulators feedthroughs (Kleindiek)

  • Space
    Colonne

Caractéristiques

  • Electron gun   :   LaB6 crystal emitter
  • Objective lens   :   Magnetic+Electrostatic (field free sample)
  • Voltage   :   1kV - 30kV
  • Spot size   :   1 to 6
  • Magnification   :   x15 to x300000
  • Max sample size   :   100mm x 125mm
  • Stage   :   5 axis motorized compucentric stage (Tilt -15° to 90°)
  • Others   :   Column Gemini (beam booster for low voltage enhancement of native resolution without stage deceleration)
  • Others   :   test
  • Detectors   :   SE (ETD)
  • Resolution   :   2.5nm @ 30kV WD=10mm
Expertises

EDX analysis

EDX analysis on tilted samples (under etch ...)

Contacts : Laurent COURAUD, Christophe DUPUIS

Micro-manipulations

Micro-manipulations (tensile tests ...)

  • Space

Contacts : Laurent COURAUD

Applications

Micro-systems

Micro-systems geometry and elemental analysis

Contacts : Laurent COURAUD

Photonic waveguides

Photonic waveguides topography

Contacts : Laurent COURAUD