MEB Zeiss LEO 1430
Large tilt Scanning Electron Microscope + EDX / ZEISS
Contacts : COURAUD Laurent
/ DUPUIS Christophe
Scanning Electron Microscope with Gemini column, EDX Si(Li) Oxford 10mm^2, large tilt stage (up to 90°), micro-manipulators feedthroughs (Kleindiek)
-
Leo1430
-
Colonne
Caractéristiques
- Electron gun : LaB6 crystal emitter
- Objective lens : Magnetic+Electrostatic (field free sample)
- Voltage : 1kV - 30kV
- Spot size : 1 to 6
- Magnification : x15 to x300000
- Max sample size : 100mm x 125mm
- Stage : 5 axis motorized compucentric stage (Tilt -15° to 90°)
- Others : Column Gemini (beam booster for low voltage enhancement of native resolution without stage deceleration)
- Others : test
- Detectors : SE (ETD)
- Resolution : 2.5nm @ 30kV WD=10mm
