reflectométre

Contactless, optical reflection measurement at normal incidence for the characterization of thin films and bulk materials   /   Sentech

Contacts :   DURNEZ   Alan     /   LAFOSSE   Xavier

  • Space
    RM 2000

Caractéristiques

  • Light source   :   Spectral range from 200 – 1000 nm
  • Spot size   :   100 µm spot
  • Thickness   :   Range of thickness measurement 2 nm ... 50 µm
  • Resolution   :   Precision (1 σ) 0.3 nm (typ. for 400 nm SiO2/Si)
  • Acquisition time   :   300 ms