Profilometer Veeco Dektak8 1
Mechanical profilometer / VEECO
Contacts : DURNEZ Alan
Location : E333
Characterize film roughness, shape and stress in true 3D*
Caractéristiques
- Max sample size : 200 mm
- Cut : 25 mm weight
- Support force : 0.1-15 mg
- Resolution : 7.5 angstrom 1σ repeatability, 1 angstrom resolution
- Stylus type : 2.5 µm