Stylus Profilometer Tencor IQ

Mechanical profilometer   /   KLA-TENCOR FRANCE SARL

Contacts :   DURNEZ   Alan  

Location : E333

  • Space
    Profilometer mecanic Temcor
  • Space
    tencor IQ

Caractéristiques

  • Displacement table   :   Max. Length sweep: 10 mm from left to right and 2 mm from right to left
  • Sweep time   :   Scanning speed: from 2 to 200 µm / s
  • Max sample size   :   4 pouces
  • Max sample size   :   17,5 mm
  • Support force   :   1 à 100 mg