Heidelberg DWL 66 fs

Mask less Lithography Laser writer   /   Heidelberg

Contacts :   BOUVILLE   David     /   BARDOU   Nathalie

DWL 66

  • Space
    Heidelberg

Caractéristiques

  • Min sample size   :   10mm
  • Max sample size   :   150mm
  • Lamp type   :   diode
  • Resolution   :   2 microns
  • Max sample size   :   125 mm
  • Min sample size   :   20 mm
Applications

Direct lithography on 4" sample

Lithography on 4" sample

  • Space

Contacts : .

Direct lithography on 4" sample

After KOH

  • Space

Contacts : .