Centre for Nanoscience
and Nanotechnology

  • CNRS

PIMENT Platform

Oven RTA Jipelec

Rapid Thermal Annealing equipment up to 1000°C   /   JIPELEC

Contacts :   MAILLARD   François  

Location : N.C.

  • Space
    RTA Jipelec JetFirst
  • Space
    RTA Jipelec

Caractéristiques

  • Max temperature   :   up to 1000°C (30" max.)
  • Gas Line   :   N2, O2, ArH2
  • Type of substrate holder   :   Graphite susceptor (w/ Lid)
  • Max sample size   :   4 inches
  • Vacuum   :   primary pumping available
  • Max ramp   :   5°C/s