Measurement of the resistivity of a thin or thick film using the 4-point in-line method. / Jandell
Contacts : VILLEBASSE Cedric
/ HERTH Etienne
Electrical resistivity is one of the most sensitive indicators of changes like semiconductor material and thin-films. The most common way of measuring the resistivity of a semiconductor material is by using a four-point collinear probe. In general, the electrical resistivity is inversely proportional to the carrier density and carrier mobility. Electrical resistivity plays an important role in widespread applications.