Optic / UV Lithography

 

A short description of the ressource

 

Wafer bonder Süss SB6

Wafer bonding / Anodic bonding / fusion bonding

Aligner EVG 620

Double-side mask aligner system

Aligner Süss MJB4 1

Mask aligner system

Aligner Süss MJB4 2

Mask aligner system

Aligner Süss MJB3 1

Mask aligner system

Aligner Süss MJB3 2

Mask aligner system

Aligneur deep UV EVG620

Mask aligner Deep UV

Spray coater EVG 101

Spray coating system

Spray developer Sawatec 2

Spray developer system

Spin coater Süss Labs 6 SU8

Spin coater for SU8 resists

Aligner Süss MA BA6

Double-side mask / bond aligner system

DWL Heidelberg 66 fs

Mask less lithography laser writer system