IAD Plassys MEB 800

Ion Assisted electron beam Deposition / In-situ ellipsometry

Sputter Plassys MP 800 S

RF sputtering for dielectric thin films

PECVD UNAXIS D200

Plasma Enhanced Chemical Vapor Deposition

PECVD Apsy

Plasma Enhanced Chemical Vapor Deposition

ALD Fiji 200

Atomic Layer Deposition equipment / Thermal / PEALD

Tubular furnaces Vegatec

2 oxidation furnaces / 2 tubular ovens

Oven RTA AET

Rapid Thermal Annealing equipment up to 1000°C

Tubular furnace Nabertherm

Single Tubular oven

Oven Polymer Eberlé

Atmospherical thermal treatment for polymer materials up to 300°C

Oven RTA Jipelec

Rapid Thermal Annealing equipment up to 1000°C

Oven RTA home-made

Rapid Thermal Annealing equipment

Parylene CVD Comelec C30H

Parylene thin films CVD deposition