IAD Plassys MEB 800

Ion assisted electron beam deposition. Dielectric thin films.

Sputtering Plassys MP800S

Sputtering deposition technique. Dielectric thin films.

PECVD UNAXIS D200

Plasma Enhanced Chemical Vapor Deposition - Dielectric Thin films

PECVD Apsy/STS

Plasma Enhanced Chemical Vapor Deposition HF/LF Generators - Dielectric thin films

ALD Fiji 200

Atomic Layer Deposition equipment - Dielectric thin films

Parylene Coating Equipment Comelec C30H ALD

Atomic Layer Deposition equipment - Parylene thin films

Vegatec Annealing ovens / oxidation furnaces

4 tubular annealing/oxidation ovens.

Rapid Thermal Annealing AET

Rapid thermal annealing equipment

Nabertherm tubular oven

Single Tubular oven

Polymer annealing oven Eberlé

Smooth atmospherical thermal treatment for polymer materials up to 300°C

RTA Jipelec JetFirst

Rapid Thermal Annealing equipment

RTA Home-made

Rapid Thermal annealing